Temperature Measurement during Millisecond Annealing

Download or read book Temperature Measurement during Millisecond Annealing written by Denise Reichel and published by Springer. This book was released on 2016-01-07 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt: Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.