Silicon Anodization as a Structuring Technique
| Author | : Alexey Ivanov |
| Publisher | : Springer |
| Total Pages | : 335 |
| Release | : 2017-09-10 |
| ISBN-10 | : 9783658192389 |
| ISBN-13 | : 3658192380 |
| Rating | : 4/5 (89 Downloads) |
Book Synopsis Silicon Anodization as a Structuring Technique by : Alexey Ivanov
Download or read book Silicon Anodization as a Structuring Technique written by Alexey Ivanov and published by Springer. This book was released on 2017-09-10 with total page 335 pages. Available in PDF, EPUB and Kindle. Book excerpt: Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
