Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry

Download or read book Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry written by OECD and published by OECD Publishing. This book was released on 2015-04-03 with total page 80 pages. Available in PDF, EPUB and Kindle. Book excerpt: This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors.