Rapid Thermal Processing and beyond: Applications in Semiconductor Processing
| Author | : Wielfried Lerch |
| Publisher | : Trans Tech Publications Ltd |
| Total Pages | : 427 |
| Release | : 2008-03-24 |
| ISBN-10 | : 9783038131731 |
| ISBN-13 | : 3038131733 |
| Rating | : 4/5 (31 Downloads) |
Book Synopsis Rapid Thermal Processing and beyond: Applications in Semiconductor Processing by : Wielfried Lerch
Download or read book Rapid Thermal Processing and beyond: Applications in Semiconductor Processing written by Wielfried Lerch and published by Trans Tech Publications Ltd. This book was released on 2008-03-24 with total page 427 pages. Available in PDF, EPUB and Kindle. Book excerpt: Special topic volume with invited papers only
