Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). Mor

Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They w

Contains papers from a May 2000 symposium, representing the state of the art in areas of dielectric materials science and process integration. Papers are arrang

"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, includ