Electrochemical Processing in ULSI and MEMS 3
| Author | : John O. Dukovic |
| Publisher | : The Electrochemical Society |
| Total Pages | : 288 |
| Release | : 2007-09 |
| ISBN-10 | : 9781566775861 |
| ISBN-13 | : 1566775868 |
| Rating | : 4/5 (61 Downloads) |
Book Synopsis Electrochemical Processing in ULSI and MEMS 3 by : John O. Dukovic
Download or read book Electrochemical Processing in ULSI and MEMS 3 written by John O. Dukovic and published by The Electrochemical Society. This book was released on 2007-09 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt: The papers in this issue describe the latest advances in fundamental and practical aspects of electrochemical processes for fabrication of microelectronic devices and related structures. Topics range from plating to etching, chips to packages, mechanisms to models, through-silicon vias to nanotubes, tin to ruthenium, capping to cooling, porous gold to porous alumina, probe-card springs to solder balls, electroless deposition to CMP, TFT-LCDs to magnetic nanowires and beyond.
