Bonding in Microsystem Technology
| Author | : Jan A. Dziuban |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 345 |
| Release | : 2007-01-30 |
| ISBN-10 | : 9781402045899 |
| ISBN-13 | : 1402045891 |
| Rating | : 4/5 (99 Downloads) |
Book Synopsis Bonding in Microsystem Technology by : Jan A. Dziuban
Download or read book Bonding in Microsystem Technology written by Jan A. Dziuban and published by Springer Science & Business Media. This book was released on 2007-01-30 with total page 345 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first compendium on silicon/glass microsystems made by deep wet etching and the first book with a detailed description of bonding techniques used in microsystem technology. Technological results presented in the book have been tested experimentally by the author and his team, and can be utilized in day-to-day laboratory practice. Special attention has been paid to the highest level of accessibility of the book by students.
