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Language: en
Pages:
Plasma and Ion Beam Processing at Los Alamos
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Proceedings of the 13 Annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing
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Handbook of Ion Beam Processing Technology
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Jerome J. Cuomo
Categories:
Science
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This book, by 36 authorities on the subject, deals with ion beam processing for basic sputter etching of samples, for sputter deposition of thin films, for synt