Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framewo

The Fourth International Conference on Ion Implantation: Equipment and Tech niques was held at the Convention Center in Berchtesgaden, Bavaria, Germany, from Se

Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. T

This unique new book is a comprehensive review of the many current industrial applications of particle accelerators, written by experts in each of these fields.

In recent years, ion implantation has developed into the major doping technique for integrated circuits. Several series of conferences have dealt with the appli