This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipli

The multi-billion-dollar microsystem packaging business continues to play an increasingly important technical role in today’s information industry. The packag

Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunit

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct fu

It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s