Full Wave Simulation of Electron Cyclotron and Helicon Plasma Processing Systems
Author | : Man-Kam Johannes Hsieh |
Publisher | : |
Total Pages | : 596 |
Release | : 1996 |
ISBN-10 | : WISC:89055764427 |
ISBN-13 | : |
Rating | : 4/5 (27 Downloads) |
Book Synopsis Full Wave Simulation of Electron Cyclotron and Helicon Plasma Processing Systems by : Man-Kam Johannes Hsieh
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