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A new edition of this industry classic on the principles of plasma processing Plasma-based technology and materials processes have been central to the revolutio
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Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are exper
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Type: BOOK - Published: 1991-02-01 - Publisher: National Academies Press
Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive,
