This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element

This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines

The book discusses the underlying physical principles of piezoelectric materials, important properties of ferroelectric/piezoelectric materials used in today’

Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building