Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to de
Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, in
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly e
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) an
MEMS by becoming a part of various applications ranging from smartphones to automobiles has become an integral part of our everyday life. MEMS is building syner