In this book the author discusses the investigation of ion bombardment of solids by computer simulation, with the aim of demonstrating the usefulness of this ap
This book presents the method of ion beam modification of solids in realization, theory and applications in a comprehensive way. It provides a review of the phy
A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of
Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and c