Introduction to Optical Metrology examines the theory and practice of various measurement methodologies utilizing the wave nature of light. The book begins by i

Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical

This volume in the SPIE Tutorial Text series presents a practical approach to optical testing, with emphasis on techniques, procedures, and instrumentation rath

A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation

The measurement and characterisation of surface topography is crucial to modern manufacturing industry. The control of areal surface structure allows a manufact