Microsystem Technology
Author | : Wolfgang Menz |
Publisher | : John Wiley & Sons |
Total Pages | : 512 |
Release | : 2008-07-11 |
ISBN-10 | : 9783527613014 |
ISBN-13 | : 3527613013 |
Rating | : 4/5 (14 Downloads) |
Book Synopsis Microsystem Technology by : Wolfgang Menz
Download or read book Microsystem Technology written by Wolfgang Menz and published by John Wiley & Sons. This book was released on 2008-07-11 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.