Silicon sensors with a three-dimensional (3-D) architecture, in which the n and p electrodes penetrate through the entire substrate, have many advantages over p

Written by the leading names in this field, this book introduces the technical properties, design and fabrication details, measurement results, and applications

Development of 3D silicon radiation sensors employing electrodes fabricated perpendicular to the sensor surfaces to improve fabrication yields and increasing pu

Written by the leading names in this field, this book introduces the technical properties, design and fabrication details, measurement results, and applications

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) an